Microstructural Investigations of VO2 Thermochromic Thin Films Grown by Pulsed Laser Deposition for Smart Windows Applications

نویسندگان

چکیده

The structural properties of VO2 thin films, grown on either LSAT or Si substrates by pulsed laser deposition (PLD), are elucidated means transmission electron microscopy (TEM) methods. TEM observations confirmed the successful growth PLD in variable thicknesses, optimizing O2 partial pressure and temperature. films adopt a columnar polycrystalline morphology with narrow columns, up to film thickness height. Four polymorphs have been detected diffraction high-resolution (HRTEM) analysis, M1 being far most abundant phase. Post-experimental strain measurements HRTEM images revealed that actual residual is minimized due grains, as well intrinsic oxide layers VO2/Si epitaxy. outcomes complementary electrical magnetic where transition from monoclinic rutile R phase has identified, influenced initial percentage phases thick films.

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ژورنال

عنوان ژورنال: Inorganics (Basel)

سال: 2022

ISSN: ['2304-6740']

DOI: https://doi.org/10.3390/inorganics10120220